Exhaust Management

Dragon

"Burn-Wet" Scrubber

Applications

  • Semiconductor processes

Features

  • Dual-stage combustion
  • Independent Fuel/O2/Air control
  • ACCS (Air Curtain Cleaning System)
  • Built-in bypass valve
  • Flash data recording capability
  • High/Low fuel interface
  • Integrated redundant abatement option with Dragon-DLE (DUO)
  • Diaphragm pump drain standard / gravity drain option
  • Fuel options: LNG / LPG
  • Heater jacket option
  • pH adjust option: NaOH injection
  • Auto inlet entry cleaner option
  • Configurable number of inlets up to 4
  • Auto inlet entry clean option (Q1 13)
  • Low CDA fan option (Q2 13)
  • Exhaust fan option (Q3 13)

Benefits

  • Virtually zero unscheduled downtime with DUO option
  • Low NOx and CO emissions with 2-stage burner
  • High abatement efficiency
  • Low utility consumption
  • Energy savings operation ready
  • HVM (high volume manufacturing) proven

Gallant C

"Burn-Wet" Scrubber

Applications

  • Display processes

Features

  • Dual-stage combustion
  • Independent Fuel/O2/Air control
  • ACCS (Air Curtain Cleaning System)
  • Built-in bypass valve
  • Flash data recording capability
  • High/Low fuel interface
  • Integrated redundant abatement option
  • Heater jacket option
  • pH adjust option: NaOH injection
  • Auto inlet entry clean option
  • Natural (gravity) drain standard / pump drain option

Benefits

  • High capacity abatement
  • Low NOx and CO emissions
  • High abatement efficiency
  • Low utility consumption
  • Energy savings operation ready
  • HVM (high volume manufacturing) proven

Durian

"Plasma-Wet" Scrubber

Applications

  • Semiconductor processes

Features

  • Reactor (process gas path) surface construction with Inconel or ceramic lining
  • High active thermal ARC Plasma Flame
  • Tool interface run mode (Energy saving mode)
  • ACCS (Air Curtain Cleaning System)
  • Inlet heater jacket option
  • Pump drain option

Benefits

  • Corrosion resistant reactor & Plasma torch
  • High Reliability
  • Easy maintenance design
  • HVM (high volume manufacturing) proven

ISIS

"Heat-Wet" Scrubber

Applications

  • Semiconductor processes

Features

  • Reactor (process gas path) surface construction with Inconel
  • SiC heaters with Inconel 600 housing
  • 850C operation
  • CDA for reaction O2
  • Steam injection Option
  • ACCS (Air Curtain Cleaning System)
  • Inlet heater jacket option
  • Pump drain option

Benefits

  • Corrosion resistant heater housing and reactor
  • Stable reactor temperature for high abatement efficiency
  • Low NOx and CO emissions
  • HVM (high volume manufacturing) proven

SDS

"Dry" Scrubber

Applications

  • Semiconductor processes

Features

  • Primary 80 liter cartridge
  • Bypass mini-cartridge
  • Standard N2 purge function
  • 80% color change sight tube
  • Double-acting pneumatic valves for power failure ride through
  • Pressure monitoring and relief
  • N2 eductor for inlet pressure control
  • Temperature monitoring and auto N2 purge function
  • Gas monitoring options
  • In-situ oxidation option

Benefits

  • Virtually zero unscheduled downtime with bypass cartridge
  • High abatement efficiency
  • Designed for target gas emissions level below TLV
  • Low overall CoO
  • HVM (high volume manufacturing) proven

SWS

"Wet" Scrubber

Applications

  • Semiconductor processes

Features

  • Inlet N2 Purge
  • Low pressure drop design
  • Transparent PVC wet chamber
  • Large volume demister chamber for gravitational settling
  • Natural (gravity) drain standard / pump drain option
  • pH adjust option: NaOH injection
  • Inlet manifold option

Benefits

  • Low operating costs
  • Simple and easy maintenance
  • Corrosion resistant wet chamber construction
  • Minimal water mist carry over to exhaust header
  • HVM (high volume manufacturing) proven

Aqua

"Wet" Scrubber

Applications

  • Semiconductor processes

Features

  • Multi-stage water scrubber
    • Packed bed co-current stages
    • Packed bed counter flow stage
    • Large volume demister chamber for gravitational settling
  • Transparent PVC wet chambers
  • Pump drain
  • pH adjust option
  • Induction fan option

Benefits

  • High capacity scrubber
  • Low operating costs
  • Simple and easy maintenance
  • Corrosion resistant wet chamber construction
  • Minimal water mist carry over to exhaust header
  • HVM (high volume manufacturing) proven

Aqua EP

"Wet-EP" Scrubber

Applications

  • Semiconductor and display processes
    • Mixed acid and alkali gas effluent
    • Wet bench exhaust treatment
    • Fine particulate removal

Features

  • Packed bed wet scrubbing stage
  • Fog nozzle wetting stage
  • Electric precipitator
  • Precipitator auto rinse
  • Purge blower for E/P system high voltage contact insulation enclosure
  • Diaphragm pump drain standard / gravity drain option
  • 5 HP induction fan option

Benefits

  • High abatement efficiency (white smoke elimination)
  • Acid and alkali gas scrubbing
  • Removal of fine particulate byproducts such as NH4Cl
  • Lower infrastructure cost option compared to adding segregated exhaust
  • HVM (high volume manufacturing) proven