Thermal Management

"Compressor Type" Chiller

Compressor Type Chiller
sales@gst-international.com for complete details

Applications

  • Etch
  • Photo
  • ELA
  • Doping

Overview

  • System for absorption of heat generated from the semiconductor and FPD manufacturing processes and to supply Working Fluid (Coolant) with consistent temperature required for the processes by cooling the Working Fluid (Coolant, etc.) with Refrigerant System

Characteristics

  • Compressor type (supports multiple channels)
  • Broad temperature band (-10℃ ~ 80℃)
  • Variable compressor capacity, with use of electric expansions valves (heatless system)
  • Use of eco-friendly refrigerants (Non CFC & HCFC)
  • Increased user convenience (use of Touch Screen)
  • Various working fluids (Coolant, Water, Brine)

"Compressor Type (Cascade)" Chiller

Compressor Type Cascade Chiller
sales@gst-international.com for complete details

Applications

  • Wafer Prober Station

Overview

  • System for supply of Working Fluid (Coolant) with consistent temperature in order to maintain low temperature(Chuck temperature : Min -55℃) of Wafer Prober Chuck required in the Wafer inspection equipment by cooling the Working Fluid(Coolant) by using Cascade Refrigerant System

Characteristics

  • Cascade Refrigerant System
  • Broad temperature band (Chuck temperature : -55℃ ~ 150℃)
  • Can be used for cold processes and hot processes
  • Fast cooling time when transitioning between processes
  • Increased user convenience (use of Touch Screen)

"Compressor + Heat Exchanger Type" Chiller

Compressor Type Cascade Chiller
sales@gst-international.com for complete details

Applications

  • Etch
  • Photo
  • ELA
  • Doping

Overview

  • System for absorption of heat generated from the semiconductor and FPD manufacturing processes and to supply of Working Fluid (Coolant) with consistent temperature required for the process by cooling the Working Fluid(Coolant) by using Refrigerant System and low-temperature process water (PCW)

Characteristics

  • Compressor Type + Heat Exchanger Type(Multi Channel supported)
  • Broad temperature band (-10℃ ~ 80℃)
  • Variable compressor capacity, with use of electric expansions valves (heatless system)
  • Minimal use of PCW through use of proportional valves
  • Use of eco-friendly refrigerants (Non CFC & HCFC)
  • Increased user convenience (use of Touch Screen)
  • Various working fluids (Coolant, Water, Brine)

"Electric Single S Type" Chiller

Electric Single S Type Chiller
sales@gst-international.com for complete details

Applications

  • Etch

Overview

  • System for absorption of heat generated from the semiconductor and FPD manufacturing processes and to supply of Working Fluid (Coolant) with consistent temperature required for the process by cooling the Working Fluid(Coolant) by using Peltier element

Characteristics

  • Thermoelectric cooling using the Peltier effect
  • Can be installed under grating
  • Eco-friendly system
  • Fast response speed and ease of control
  • Minimal installation space
  • Minimization of use of working fluid (coolant)

"Electric Single D Type" Chiller

Electric Single S Type Chiller
Electric Single S Type Chiller
sales@gst-international.com for complete details

Applications

  • Etch

Overview

  • System for absorption of heat generated from the semiconductor and FPD manufacturing processes and to supply of Working Fluid (Coolant) with consistent temperature required for the process by cooling the Working Fluid(Coolant) by using Peltier element

Characteristics

  • Thermoelectric cooling using the Peltier effect
  • Can be installed beneath process equipment
  • Eco-friendly system
  • Fast response speed and ease of control
  • Minimal installation space
  • Minimization of use of working fluid (coolant)

"Electric + Heat Exchanger Dual Type" Chiller

Electric + Heater Exchanger Dual Type Chiller
sales@gst-international.com for complete details

Applications

  • Etch

Overview

  • Peltier element and System that uses low-temperature process water (PCW) to cool working fluid (colant, etc.) and absorb the heat arising from semiconductor and FPD manufacturing processes, supplying working fluid (coolant) at a constant temperature required in processes

Characteristics

  • Thermoelectric cooling using the Peltier effect
  • Electric Type + Heat Exchanger Type
  • Eco-friendly system
  • Fast response speed and ease of control
  • Minimal installation space
  • Minimization of use of working fluid (coolant)

Heat Exchanger Type

Heat Exchanger Type
sales@gst-international.com for complete details

Applications

  • Etch
  • CVD
  • ALD

Overview

  • System that uses low-temperature process water (PCW) to cool working fluid (colant, etc.) and absorb the heat arising from semiconductor and FPD manufacturing processes, supplying working fluid (coolant) at a constant temperature required in processes

Characteristics

  • Heat Exchanger Type(Multi Channel supported)
  • Can be used at high temperatures (30℃ ~ 200℃)
  • Minimal use of PCW through use of proportional valves
  • Minimal heater use
  • Increased user convenience (use of Touch Screen)
  • Various working fluids (Coolant, Water, Brine)